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发明名称
ETCHING METHOD
摘要
申请公布号
JPS5591832(A)
申请公布日期
1980.07.11
申请号
JP19780164801
申请日期
1978.12.28
申请人
FUJITSU LTD
发明人
KUSUKI TOSHIHIRO
分类号
H01L21/308;H01L21/306;H01L31/02;H01L31/04
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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