| 摘要 |
PURPOSE:To obtain a surface plate suitable for a simple color camera, having high light-utilization rate and less uneven picture as well as less color mixing of light, by rising the base plate temperature at the time of color-separation line filter formation to a temperature higher than the surface temperature of base plate during a light-permeable membrane covering process. CONSTITUTION:The color-separation line filter 22 containing one or more metal oxides is formed on the surface of the light-permeable base plate 21, and then the light-permeable membrane 23 is formed on the surface of the filter 22 and the base plate 21 by rising the temperature of the base plate during the filter 22 forming period to a temperature higher than the surface temperature of the base plate during the deposition period of the light-permeable membrane 23. For example, in the case of the SiO2-TiO2 cyanide filter, a lift material such as Cu, Ag, etc., is formed in an opposite pattern to the filter pattern on the surfade of the high-permeable base plate 21, and then SiO2 and TiO2 are alternately deposited while keeping the temperature of base plate at 300 deg.C or more. Then, the lift material is removed and the glass thin membrane 23 is deposited under a condition that the temperature of base plate is kept at 250-300 deg.C. |
