发明名称 SPUTTERING MULTIPLE CYLINDERS
摘要 Method and apparatus for sputter coating of printing or similar type cylinders by means of r.f. sputtering in which each of the cylinders being coated comprises a thin, metal sleeve of cylindrical configuration mounted on a mandrel. A plurality of mandrels is mounted in a sputtering chamber on a spider which is rotated coaxially with a cylindrical target, the target being stationary. A fixed ring gear cooperates with pinions on each of the mandrels to impart an epicyclic movement to the mandrels, each of which mounts a sleeve.
申请公布号 AU4302979(A) 申请公布日期 1980.07.10
申请号 AU19790043029 申请日期 1979.01.02
申请人 COULTER SYSTEMS CORPORATION 发明人 MANFRED RUDOLF KUEHNLE
分类号 C23C14/34;C23C14/50 主分类号 C23C14/34
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