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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPS5590228(A)
申请公布日期
1980.07.08
申请号
JP19780159178
申请日期
1978.12.26
申请人
NIPPON TELEGRAPH & TELEPHONE
发明人
ASAKAWA MAKOTO;MATSUO SEITAROU;KANAI MUNENORI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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