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发明名称
摘要
申请公布号
JPS5596651(U)
申请公布日期
1980.07.04
申请号
JP19800002828U
申请日期
1980.01.14
申请人
发明人
分类号
H01L29/78;H01L21/768;H01L23/522;(IPC1-7):H01L21/88
主分类号
H01L29/78
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