发明名称 Manufacturing process of semiconductor devices
摘要 Process of manufacturing semiconductor devices by providing on the surface of a substrate of one conductivity at first only a covering with a doping agent of the other conductivity and then, after the building of mesas, the PN-junction is formed by diffusion in an oxidizing atmosphere whereby simultaneously a protecting SiO2 layer is formed on the free surface of the mesa.
申请公布号 US4210472(A) 申请公布日期 1980.07.01
申请号 US19780961355 申请日期 1978.11.16
申请人 ITT INDUSTRIES INC 发明人 HOFFMANN, HANS;KRIEGER, PETER
分类号 H01L21/225;H01L21/316;H01L21/329;H01L21/56;H01L29/861;(IPC1-7):H01L21/22 主分类号 H01L21/225
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