APPARATUS AND PROCESS FOR PHOTO-EXPOSING SEMICONDUCTOR WAFERS,申请号IL19800059629-传众专利搜索

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发明名称	APPARATUS AND PROCESS FOR PHOTO-EXPOSING SEMICONDUCTOR WAFERS
摘要
申请公布号	IL59629(D0)	申请公布日期	1980.06.30
申请号	IL19800059629	申请日期	1980.03.14
申请人	ELECTROMASK INC	发明人
分类号	H01L21/30;G03B27/52;G03F7/20;G03F7/207;G03F9/00;G03F9/02;H01L21/027;H01L21/68	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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