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发明名称
RECIPIENTE DI REAZIONE PER DEPOSITARE MATERIALE SEMICONDUTTORE SU CORPI DI SUPPORTO RISCALDATI
摘要
申请公布号
IT1046164(B)
申请公布日期
1980.06.30
申请号
IT19740029815
申请日期
1974.11.26
申请人
SIEMENS AG
发明人
分类号
C23C14/24;C23C16/44;C30B25/08;C30B25/16;H01L21/205;(IPC1-7):B01J/
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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