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发明名称
ALIGNMENT MARK FORMATION
摘要
申请公布号
JPS5586118(A)
申请公布日期
1980.06.28
申请号
JP19780161625
申请日期
1978.12.23
申请人
FUJITSU LTD
发明人
OGAWA RIYUUICHI
分类号
H01L21/027;H01L21/30
主分类号
H01L21/027
代理机构
代理人
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