发明名称 ABRASION METHOD OF POLYCRYSTAL MATERIAL
摘要 PURPOSE:To finish a polycrystal work into an invariable mirror surface, by applying a processed liquid with a mixing made between fine powdery abrasive and chemical abrasive liquid respectively consisting of specific components. CONSTITUTION:In a processed liquid 6, with a mixing made between fine powder of Fe2O3 and hydrochloric acid water solution, the work of Mn-Zn polycrystal ferrite 7 and a lap 3 are made in relative motion, and a dynamic pressure fluidic bearing is constructed between the ferrite 7 and the lap 3 by a fluidic pressure of the processed liquid 6, with a sample holder 8 floated from a level of the lap 3. And a ruggedness of the ferrite 7, produced by a processing of abrasion of the fine powder of Fe2O3, is processed a chemical abrasion by hydrochloric acid, and the ferrite 7 is finished into a mirror surface of invariable quality without a level difference.
申请公布号 JPS5583561(A) 申请公布日期 1980.06.24
申请号 JP19780153937 申请日期 1978.12.12
申请人 发明人
分类号 H01L21/304;B24B37/00 主分类号 H01L21/304
代理机构 代理人
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