发明名称 |
Magnetic lens arrangement for corpuscular radiation equipment working under a vacuum |
摘要 |
A magnetic lens arrangement for corpuscular radiation equipment working under a vacuum, in particular an objective lens for high voltage electron microscopes, which permits having objects to be examined disposed in a vacuum chamber at room temperature, is achieved by an arrangement which includes a vacuum chamber having a lens coil winding, a superconductive shielding device which is of cup-shaped design and encloses the winding, two superconductive shielding cylinders disposed one behind the other with mutual spacing enclosed by the winding, with a vacuum chamber for the object to be examined disposed in front of the open side of the shielding device and the first shielding cylinder.
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申请公布号 |
US4209701(A) |
申请公布日期 |
1980.06.24 |
申请号 |
US19780891894 |
申请日期 |
1978.03.30 |
申请人 |
SIEMENS AG |
发明人 |
DIETRICH, ISOLDE;FOX, FRED;KNAPEK, ERWIN;LEFRANC, GUY;NACHTRIEB, KARL;WEYL, REINHARD;ZERBST, HELMUT |
分类号 |
H01J37/141;H01J37/26;(IPC1-7):H01J37/00 |
主分类号 |
H01J37/141 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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