发明名称 Magnetic lens arrangement for corpuscular radiation equipment working under a vacuum
摘要 A magnetic lens arrangement for corpuscular radiation equipment working under a vacuum, in particular an objective lens for high voltage electron microscopes, which permits having objects to be examined disposed in a vacuum chamber at room temperature, is achieved by an arrangement which includes a vacuum chamber having a lens coil winding, a superconductive shielding device which is of cup-shaped design and encloses the winding, two superconductive shielding cylinders disposed one behind the other with mutual spacing enclosed by the winding, with a vacuum chamber for the object to be examined disposed in front of the open side of the shielding device and the first shielding cylinder.
申请公布号 US4209701(A) 申请公布日期 1980.06.24
申请号 US19780891894 申请日期 1978.03.30
申请人 SIEMENS AG 发明人 DIETRICH, ISOLDE;FOX, FRED;KNAPEK, ERWIN;LEFRANC, GUY;NACHTRIEB, KARL;WEYL, REINHARD;ZERBST, HELMUT
分类号 H01J37/141;H01J37/26;(IPC1-7):H01J37/00 主分类号 H01J37/141
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