| 摘要 |
<p>PURPOSE:To prevent degradation to improve reliability and sensitivity by giving a hermetical structure, where a pore rate is regulated for a part of the surface layer at least, in a humidity sensor having a porous metallic oxide layer where electrodes are given. CONSTITUTION:A humidity sensor is constituted by providing electrode 102 in a humidity sensitive porcelain of a pore rate of 10-40% and an average pore diameter below 2mum and providing hermetical structure material 104 of a pore rate below 10% in a part of the surface layer including electrode 102 at least. In respect to hermetical structure material 104, low-melting point glass (melted at 500 deg.C), epoxy resin, Pb Sn alloy solder, etc., are used.</p> |
