| 摘要 |
A surface acoustic wave (SAW) pressure sensor 10 is mechanically supported within a vacuum sealing structure 32, 36 by a cylindrical metal sleeve 44 which isolates the SAW sensor substrate 11 from induced thermal strain resulting from temperature cycling of the structure, and which provides for a fluid conduit 48 through the vacuum environment from the sensor diaphragm to an orifice 50 formed through the wall of the structure. <IMAGE> |
