| 摘要 |
PURPOSE:To provide a head which may easily be made and have a high reliability by applying anti-wear protective film mixed with Si having an anti-oxidation and anti-wear characteristics. CONSTITUTION:A substance of Si is placed on SiC target to show a suitable area ratio therein, ans spattered under a high frequency to have a mixed film 8 of suitable composition. The film thus may also be made by an evaporation process. A hardness of the film may be decreased as a volume of the mixed Si is increased. A characteristic of anti-oxidation may be maintained by a film added with a volume of Si of 10% or so. A similar film may be made by a mixed film production process in which the substance of Si is impregnated into the SiC target under a high temperature. Sin the protective film 8 shows a high thermal conductivity, a superior thermal distribution may be provided and an improved printing condition and a high thermal efficiency may be found in the head. |
