Crucibleless zone melting device - with adjustable swivelling support arms for pulled single crystal

摘要

The device is fitted with at least two swivelling arms which are hinged to the lower revolving shaft. A retainer ring which can be moved axially and radially surrounds the swivelling arms and is used to adjust their angular position for an effective support of the pulled single crystal rod. Pref. the retainer ring is a light metal, more pref. Al or Ti, and the swivelling arms are Si or a light metal, more preF. Al or Ti. The long swivelling arms ensure a more stable support for the pulled crystal at a greater distance from the seed crystal. They are effective even for very thick and long single crystal rods of silicon.