PROCESS FOR MAKING FIELD EFFECT AND BIPOLAR TRANSISTORS ON THE SAME SEMICONDUCTOR CHIP

摘要

PROCESS FOR MAKING FIELD EFFECT AND BIPOLAR TRANSISTORS ON THE SAME SEMICONDUCTOR CHIP A process and the resulting structure for making metal oxide silicon field effect transistors and vertical bipolar transistors on the same semiconductor chip with the devices being dielectrically isolated from each other. The process does not require an epitaxial layer. The bipolar devices have utility as cross-chip or offchip drivers or can be utilized for analog circuitry.