METHOD FOR MANUFACTURING A MASK WITH AN ASPECT RATIO41

摘要

FABRICATION OF HIGH ASPECT RATIO MASKS A method of constructing masks characterized by a high aspect ratio. The method includes at least a single exposure of a mask by radiation which is transmitted by the substrate before impinging on the resist. In a specific embodiment the mask is partially completed and the already deposited mask modulates the radiation transmitted by the substrate before it exposes the resist.