| 摘要 |
PURPOSE:To prevent the generation of abnormal discharge and to evaporate the evaporation material at a constant speed, by providing the ion trap converging and catching ion beam in the beam-form generated in the neighborhood of flowing space of electron beam nearby electron gun of evaporation apparatus. CONSTITUTION:Electron discharged from the filament 2, is converged in the evaporation material 8 in the beam-form and is run against the material 8 and then, the material 8 is evaporated by heating. The first electrode 12 provided in front and composing ion trap, is kept at earth electric potential and nearly the same voltage to that of the filament 2, is applied on the second electrode provided in the rear of the filament 2. Evaporated particle ionized positive ion or postive by an electrostatic lens action by an electric field formed by the earth electric potential of the electrode 12 and high voltage of the electrode 14, is trapped and is removed by the electrode 14 shown as dotted line. Hereby, reactive substance of desired ratio is made in a constant reaction gas. |
