| 摘要 |
PURPOSE:To enable to be obtained a good unevaporated part by oil mask process and to improve the operation efficiency, by using the oil having characteristics of mean molecular weight, vapor pressure etc. independently or in mixed state. CONSTITUTION:A fixed pattern oil is given to the substrate to be evaporated 2 by the oil feeding apparatus 6 and the substrate 2 is passed through the drum 3. On the above process, evaporation is carried out by metal vapor, such as Al etc., from the metal evaporation source 5. Reevaporation of stuck oil is accelerated by the heat of metal vapor and unevaporated part is secured obstructing sticking of vaporized metal. By the above oil mask process, the oil having characteristics, such as mean molecular weight; 230-680, vapor pressure; 0.1-20 Torr. at 200 deg.C, is used independently or in mixed state as feeding cil. By the above method, Al evaporation is made possible at the oil mask process. |
