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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
GB1569117(A)
申请公布日期
1980.06.11
申请号
GB19760045807
申请日期
1976.11.03
申请人
TOKUDO SEISAKUSHO KK
发明人
分类号
H01J37/34;(IPC1-7):C23C15/00
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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