ETCHING OF SEMICONDUCTOR DEVICE,申请号JP19780147359-传众专利搜索

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发明名称	ETCHING OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS5574143(A)	申请公布日期	1980.06.04
申请号	JP19780147359	申请日期	1978.11.28
申请人	FUJITSU LTD	发明人	SHIBATA SHIYUUSAKU
分类号	H01L21/308;H01L21/306	主分类号	H01L21/308
代理机构		代理人
主权项
地址

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