发明名称 CUTTING METHOD OF SEMICONDUCTOR WAFER
摘要 The high efficiency cutting method is disclosed. A wafer have manyu semiconductor clements divided vertically and horizontally by grooved lines on its surface. A soft thin plate is attached on the reverse side of the wafer, which is transferred to the gap placed between drum type and hourglass drum type rollers. The wafer is sliced simultaneously by presures and curved parts of a pair of the rollers.
申请公布号 KR800000465(B1) 申请公布日期 1980.05.29
申请号 KR19750000749 申请日期 1975.04.11
申请人 SHINNIPPON DENKI CO LTD 发明人 ENBE MASA
分类号 H01L21/00;(IPC1-7):H01L21/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址