| 摘要 |
PURPOSE:To readily obtain magnetic thin film having high magnetic resistance and large residual-magnetic-flux density by adding Cu to FexCOy. CONSTITUTION:An oxidized magnetic body comprises FexCOyCuz whose composition is 0.50<=X<0.95, 0.05<Y<=0.30 and 0<=Z<0.20, where X+Y+Z=1. In manufacturing, a vacuum container 2 is evacuated to a high vacuum state of 10<-5>- 10<-6> (Torr), a cock of an oxygen bomb 3 is opened, a needle valve 4 is opened, and oxygen gas is introduced into the vacuum container 2 from the oxygen bomb 3 through a gas introduction pipe 5. Then, by an electronic beam evaporation method, an FexCOyCuz-system oxidized-magnetic film is stacked on a substrate 9 by melting and evaporating thermo-electrons emitted from a W filament 71, which has a negative high potential, together with a material-to-be melt comprising FexCOyCuz- system oxide which is filled in a hearth 7 at a ground potential.
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