MARK SENSING METHOD,申请号JP19780144135-传众专利搜索

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发明名称	MARK SENSING METHOD
摘要
申请公布号	JPS5571024(A)	申请公布日期	1980.05.28
申请号	JP19780144135	申请日期	1978.11.24
申请人	HITACHI LTD;NIPPON TELEGRAPH & TELEPHONE	发明人	HAMAMOTO NOBUO;ICHINO KAZUO;OOKUBO TSUNEO
分类号	H01L21/027;H01J37/304	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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