INSPECTION UNIT BY LASER LIGHT FOR FINE DEFICIENCY ON SURFACE,申请号JP19780143442-传众专利搜索

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发明名称	INSPECTION UNIT BY LASER LIGHT FOR FINE DEFICIENCY ON SURFACE
摘要
申请公布号	JPS5570732(A)	申请公布日期	1980.05.28
申请号	JP19780143442	申请日期	1978.11.22
申请人	HITACHI LTD	发明人	KOIZUMI MITSUYOSHI;AKIYAMA NOBUYUKI
分类号	G01N21/88;G01N21/958	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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