ETCHING METHOD OF COMPOUND SEMICONDUCTOR,申请号JP19780143989-传众专利搜索

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发明名称	ETCHING METHOD OF COMPOUND SEMICONDUCTOR
摘要
申请公布号	JPS5570021(A)	申请公布日期	1980.05.27
申请号	JP19780143989	申请日期	1978.11.21
申请人	NIPPON ELECTRIC CO	发明人	KAKUI AKIRA
分类号	C30B23/02;H01L21/203;H01L21/205;H01L21/26;H01L21/268;H01L21/302;H01L21/3065	主分类号	C30B23/02
代理机构		代理人
主权项
地址

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