FORMATION OF THIN FILM PATTERN,申请号JP19780143438-传众专利搜索

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发明名称	FORMATION OF THIN FILM PATTERN
摘要
申请公布号	JPS5570026(A)	申请公布日期	1980.05.27
申请号	JP19780143438	申请日期	1978.11.22
申请人	HITACHI LTD	发明人	ABE HIDEO;MIURA YOSHITSUGU
分类号	H01L21/306;H01L21/302;H05K3/06	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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