| 摘要 |
<p>APPLICATION OF ROBERT C. WHITEHEAD, JR. FORCE TRANSDUCING CANTILEVER BEAM AND PRESSURE TRANSDUCER INCORPORATING IT A differential pressure and process pressure transducer includes a semiconductor cantilever beam, a diaphragm, a spacer, and a back plate. The diaphragm, spacer, and back plate, fabricated from glass, quartz or silicon, or a combination of those materials, are bonded together at their peripheries to form a cup. The ends of the beam are bonded, respectively, to the supported periphery of the diaphragm and to an intermediate deflecting portion thereof, whereby pressure forces within the cup are transmitted by the diaphragm to the beam. Piezoresistive elements are diffused into the surface of the beam to produce an electric signal in accordance with the strain produced in the beam as the result of the pressure forces. In one embodiment, the cantilever beam is a flat plate. In another embodiment, the beam includes a portion at the mounting end that is massive relative to the stress sensitive portion of the beam. The juncture of the massive mounting portion and the stress sensitive portion is an abrupt step, whereby a precise fulcrum for the stress sensitive beam portion is provided. In another embodiment, a relatively massive beam portion also is provided at the movable end of the beam remote from the mounting end. Other embodiments include a glass wire or a spring inserted between the movable end of the beam and the deflecting portion of the diaphragm.</p> |
