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发明名称
PREPARATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5567156(A)
申请公布日期
1980.05.21
申请号
JP19780140303
申请日期
1978.11.14
申请人
MITSUBISHI ELECTRIC CORP
发明人
IWASAKI KATSUKI
分类号
H01L23/48
主分类号
H01L23/48
代理机构
代理人
主权项
地址
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