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发明名称
摘要
申请公布号	JPS5518781(B2)	申请公布日期	1980.05.21
申请号	JP19720109427	申请日期	1972.11.02
申请人		发明人
分类号	C23C18/42;H01L21/288;H01L35/34	主分类号	C23C18/42
代理机构		代理人
主权项
地址

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