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发明名称
摘要
申请公布号
JPS5574059(U)
申请公布日期
1980.05.21
申请号
JP19780157063U
申请日期
1978.11.15
申请人
发明人
分类号
H01L27/06;H01L21/331;H01L21/761;H01L21/8222;H01L27/07;H01L29/73;H01L29/861;(IPC1-7):H01L27/06;H01L29/70;H01L29/91
主分类号
H01L27/06
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代理人
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