发明名称 Specimen holder for electron microscope sample - has sample carrier with face at inclined angle and micrometer head adjustment for two lateral movements and two angles of rotation
摘要 <p>The electron microscope has an electron-optical attachment (2) delivering an electron beam (4) to the upper side of a sample chamber (6) in which a sample carrier (12) is situated. The sample carrier is equipped with an adjustment unit (16), movement in the X-direction being made by a manually operated drive (24), with a peripheral scale. The drive mechanism passes into the sample chamber through a vacuum tight gland (28). The sample carrier (12) has a rectangular section, with a corner piece missing where a sloping face is provided to hold the sample at an angle of about 30 deg. The adjustment device has also adjustment in the y direction and toothed wheel discs (30, 32) to move the sample about two orthogonal axes of rotation.</p>
申请公布号 DE2847201(A1) 申请公布日期 1980.05.14
申请号 DE19782847201 申请日期 1978.10.30
申请人 SIEMENS AG 发明人 TREML,HANS
分类号 H01J37/20;(IPC1-7):01J37/28 主分类号 H01J37/20
代理机构 代理人
主权项
地址