发明名称 Photoelectric detecting apparatus
摘要 An improved photoelectric detecting apparatus is disclosed in which a subject surface containing a pattern which diffracts light in a predetermined direction is scanned with spotlight and the diffracted light coming from the pattern is detected by means of photoelectric element so as to read out information of the pattern. The apparatus comprises a first photoelectric element for detecting the light diffracted in the predetermined direction, a second photoelectric element adapted for detecting light diffracted in directions other than the predetermined direction and an operational circuit for operating the signal derived from the first photoelectric element and that derived from the second one. Thus, when there is any diffractive matter such as flaw, dust and the like on the subject surface, diffracted light from the diffractive matter is detected by both the first and second photoelectric elements whereas diffracted light from the pattern is detected only by the first photoelectric element. By operating the outputs of the two photoelectric elements only the necessary information of the pattern can be read out.
申请公布号 US4202627(A) 申请公布日期 1980.05.13
申请号 US19780900856 申请日期 1978.04.28
申请人 CANON K K 发明人 HIRAGA, RYOZO;KANO, ICHIRO;KATO, YUZO;OGINO, YASUO;SUZKI, AKIYOSHI;TOZUKA, MASAO;YOSHINARI, HIDEKI
分类号 G01B11/00;G01B11/02;G02B27/00;G02B27/46;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G01B11/00 主分类号 G01B11/00
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