Method for manufacture of indium oxide (III) film,申请号US19790018260-传众专利搜索

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发明名称	Method for manufacture of indium oxide (III) film
摘要	An indium oxide (III) film produced by a method which comprises first forming a film of indium oxide (I) and subsequently oxidizing the film.
申请公布号	US4202917(A)	申请公布日期	1980.05.13
申请号	US19790018260	申请日期	1979.03.07
申请人	AGENCY OF IND SCIENCE & TECHNOLOGY;JAPAN INTERNATIONAL TRADE IND MIN OF	发明人	ISHII, EIICHI;ISHIKAWA, HIROSHI;MIYAKE, YOSHIZO;NAKANE, MASANORI;UEHARA, ITSUKI
分类号	C01G15/00;C03C17/27;C23C8/10;C23C14/08;C23C14/58;H01B13/00;H01C7/04;(IPC1-7):B05B5/00;B05D3/02	主分类号	C01G15/00
代理机构		代理人
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