| 摘要 |
PURPOSE:To obtain an optical fiber with high gas utilization efficiency by oxidizing feed gases with ozone-contg. O2 or air and contacting the oxidized gases to a heated glass substrate to form soot, thereby increasing the oxidation rate and reducing the production time. CONSTITUTION:Raw material SiCl4 and POCl3 are filled into containers 1, 2, and O2 is bubbled from cylinder 7 through valves 3, 4 and flow meters 5, 6 to vaporize the SiCl4 and POCl3 in the O2. On the other hand, O2 is supplied to ozonizer 10 through valve 8 and flow meter 9, and ozone generated is introduced into rotating quartz glass tube 11 together with the O2 contg. SiCl4 and POCl3 gases. In tube 11 the gases are heated to a predetermined temp. with oxyhydrogen flame 12 to deposit a preformed base material of phosphosilicate glass film (soot) on the glass inside. This base material is spun into an optical fiber by a usual method. By this method the oxidation rate is increased as compared to a conventional method, and the operation can be performed at a relatively low temp., resulting in no heat deformation of tube 11. |
