发明名称 METHOD OF CUTTING MONOCRYSTAL
摘要 PURPOSE:To readily machine a monocrysal and reduce the cost thereof by employing a cutting jig having standard surfaces for measuring and cutting the bearing thereof when forming an orientation flat on the peripheral edge of a monocrystal ingot. CONSTITUTION:A jig of the undermentioned structure is used as a crystal cutting jig when forming an orientation flat on the peripheral edge of a monocrystal ingot such as LiTaO3, LiNbO3 used for an elastic surface wave element. That is, a bearing measuring standard surface 2 and a cutting standard surface 3 are respectively provided at an angle theta determined by the direction of the orientation flat as a standard on the outside surface of the jig, the ingot 1 is interposed therebetween, a telescopic crystal pressing plate 4 provided on the jig is adjusted by a tightening screw 5 to make contact at three points between the jig and the plate 4. Then, the standard surface 2 is inclined at the angle theta to make contact with a cutter 8 to thereby form a deired flat surface and to then check it with an X-ray detector 7.
申请公布号 JPS5562742(A) 申请公布日期 1980.05.12
申请号 JP19780134454 申请日期 1978.11.02
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 WASHITSUKA SHIYOUICHI
分类号 B28D5/02;B28D5/00;H01L21/304;H03H3/08 主分类号 B28D5/02
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