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发明名称
PROBE CARD
摘要
申请公布号
JPS5562746(A)
申请公布日期
1980.05.12
申请号
JP19780136093
申请日期
1978.11.05
申请人
FUJITSU LTD
发明人
ASAOKA HIROMICHI;YANAGISAWA YUKIO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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