DEVICE FOR MEASURING SPREADING RESISTANCE,申请号JP19780135971-传众专利搜索

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发明名称	DEVICE FOR MEASURING SPREADING RESISTANCE
摘要
申请公布号	JPS5560869(A)	申请公布日期	1980.05.08
申请号	JP19780135971	申请日期	1978.10.31
申请人	MITSUBISHI ELECTRIC CORP	发明人	TSUKAMOTO KATSUHIRO
分类号	G01R27/00;G01R27/14;H01L21/66	主分类号	G01R27/00
代理机构		代理人
主权项
地址

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