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发明名称
GAS PLASMA ETCHING DEVICE
摘要
申请公布号
JPS5561026(A)
申请公布日期
1980.05.08
申请号
JP19780133934
申请日期
1978.10.30
申请人
CHO LSI GIJUTSU KENKYU KUMIAI
发明人
TOBINAGA MINETO;KOMIYA HIROYOSHI;TOYODA HIROYASU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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