Opto-electronic sensor cell with doped semiconductor substrate - has two parallel slots, with differently doped strip-like zones at slot bottoms

摘要

The sensor cell substrate has a terminal and two parallel strip zones doped in an opposite sense to the substrate. They have terminals, and an insulating layer at least partly covers this surface of the substrate. A transparent electrode(6) covers the substrate surface between the strip zones. The strip zones(8, 9) run along deeper sides of two parallel slots(3, 4) in the substrate(1). A Schottky contact is(10) formed intermediately in the regions between the two strip zones(8, 9).