| 摘要 |
PURPOSE:To accurately bond a work, by preventing the revolution and vibration of the work by holding down an outer circumference of a work table, which can be rotated, by means of at least three guide rollers. CONSTITUTION:A work table 6 for placing a work 5 is directly coupled with a shaft 7 and formed in a revolution-possible shape, and the shaft 7 is supported by means of a bearing 8. At least three guide rollers 9 are disposed on an outer circumference of the columnar work table 6 so that the rotary portions be brought to contact conditions. The vibration of the work table produced due to the bending of a shaft 4 and slippage from the central axis can be prevented because the center of the work table and the center of revolution can be conformed according to such constitution, the positional accuracy of the work table in case of the suspension of revolution is improved and the yield of bonding and reliability can be bettered. |
