APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE,申请号JP19780130218-传众专利搜索

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发明名称	APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS5556638(A)	申请公布日期	1980.04.25
申请号	JP19780130218	申请日期	1978.10.23
申请人	NIPPON ELECTRIC CO	发明人	AOYAMA HIROSHI;SATOU SUSUMU
分类号	H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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