| 摘要 |
PURPOSE:To make possible a diagraphical indication of defect signals obtained in use of a rotary type optical face plate defect scanning mechanism by determining the existence thereof in terms of marginal measuring units divided with a roughly fixed area on the face plate. CONSTITUTION:Circumferences are set for a face plate with the radius R by giving radia R/2<0>, R/2<1>..., determined by reducing the radius R by one-half in sequence. Spaces between the radius R and R/2 and R/2<2>... are called as the area I,II.... In the drawing, there are areas up to VII by assuming n=6. Regarding the angle theta of rotation, in the area I whose radius is the largest, the whole circumference (360 deg.) is equally divided into 2<m>, 2<m-1> in the area II.... In the drawing, these divided angles are indicated by DELTAtheta1, DELTAtheta2... by assuming m=8. Then, further circumferences are set with radia determined by subdividing the radius R in terms of a marginal length DELTAR in sequence. If a defect signal exists within a marginal area DELTAd surrounded by DELTAR and DELTAtheta, it is determined that defects are present in the area regardless of the number of signals. The distribution of defects thus microscopically grasped is diagraphically indicated for example by colors. |
