METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE,申请号JP19780127291-传众专利搜索

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发明名称	METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS5555523(A)	申请公布日期	1980.04.23
申请号	JP19780127291	申请日期	1978.10.18
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	KOTANI SHIGEO;YANAI NOBUHARU;SHIOZAKI MASAKAZU
分类号	H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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