DRY ETCHING EQUIPMENT AND CASSETTE

摘要

PURPOSE:To prevent corrosion of Al on the surface of a dry-etched wafer, by depositing chlorine ions on the wafer surface by a vacuum vaporization by a method wherein sheet-like heaters are incorporated in a cassette for unloading. CONSTITUTION:In a cassette 12 for unloading to store dry-etched wafers 7, sheet-like heaters 15 are located at fixed distances. The wafers 7 are stored between the heaters 15. The heaters 15 heat the wafers 7 to a temperature so that chlorine ion corrosive material attached to the surface of the wafers 7 is vaporized. Vaporized gases are exhausted. Since the dry-etched wafers 7 are heated in the cassette 12 before being taken out of the equipment, chlorine ions on the surface of the wafers 7 is vaporized in a vacuum to be exhausted. As a result, corrosion of Al on the surface of the etched wafers 7 is prevented.