| 摘要 |
A gas discharge vuv light source is disclosed having low inductance and a high intensity output covering a range from 90 A to 6000 A. The source comprises a capillary defining a first bore removably, and at least partially, mounted within an air-cooled ceramic insulator; a first, hollow, cylindrical electrode having a removable insert defining a second bore disposed in end-to-end, coaxial relationship with one end of the capillary, and a second, hollow electrode which is configured to define a cavity and so as both to support the insulator such that the first and second bores are coaxially aligned with the cavity, and to releasably support either a tubular insert or a finned plate insert; and metallic vacuum seals connecting the electrodes to the insulator such that a gas-tight seal is formed between each electrode and the insulator at locations isolated from the first and second bores and from the cavity.
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