| 摘要 |
PURPOSE:To enable the correction of unbalance with high accuracy and raise the accuracy of grinding, by detecting the whirl of a grindstone shaft due to the slight imbalance of the shaft, through a no-contact minute displacement meter. CONSTITUTION:A grindstone shaft 2 is supported on an air bearing 3 which has a very high accuracy and is fixed in a housing 4. A grindstone 1 is secures on the tip of the grindstone shaft. The housing 4 ls moved toward a workpiece 5 on a chuck 6 to grind the workpiece by the grindstone 1. A no-contact minute displacement meter 7 is installed in a hole 8 of the housing 4 so that a gap 9 is defined between the tip of the meter and the grindstone shaft 2. When the grindstone shaft and the housing suffer from disturbance vibration, the meter 7 is vibrated together with the grindstone shaft 2. Therefore, the meter 7 and the shaft 2 are not moved relatively to each other. As a result, the minute whirl of the grindstone shaft 2 can be detected by the meter 7. |
