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发明名称
摘要
申请公布号	JPS5514534(B2)	申请公布日期	1980.04.17
申请号	JP19720018323	申请日期	1972.02.21
申请人		发明人
分类号	H01L21/67;H01L21/301	主分类号	H01L21/67
代理机构		代理人
主权项
地址

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