| 摘要 |
PURPOSE:To reduce the size of an electronic watch by employing a diffusion self aligned (DSA) transistor for the output driver of the watch. CONSTITUTION:When p<+>-type region 32 becoming a base, n<+>-type region 34 becoming a source, and n<+>-type region 33 becoming a drain are formed by a self alignment together with an insulating film 37 and metal wiring 38 after forming a gate insulating film 35 on a p-type substrate 31, a DSAFET of short channel is fabricated by the diffusion difference occurred by the double diffusion by the gate and the self alignment. Accordingly, when the DSAFET of short effective channel length is used as the output driver of the indicator for the watch, it contributes to the miniaturization of the electronic watch. |
