| 摘要 |
<p>PURPOSE:To strengthen the bonding strength between cathode, support cylinder, heat-resistant insulator by the procedure in which a heat-resistant insulator thin film is formed on the back side of cathode and also on the inside of support cylinder, a heater is arranged inside the support cylinder, and a heat-resistant insulator is filled into the support cylinder and sintered. CONSTITUTION:The cathode 11 and the support cylinder 12 are fixed to each other to form a bottomed cylinder and then the heat-resistant insulator alumina 13 is filled into the cylinder to form the alumina thin film 14 on the back side of the cathode 11 in contact with the heat-resistant insulator 13 and also on the inside surface of the support cylinder 12. Then, the tungsten filament heater 15 is arranged in the inside of the cylinder and further alumina is filled into it so as to bury the heater 15 for sintering. Thus, the adhesion of the insulator to the support cylinder becomes better with the aid of the insulator thin film by electrodeposition and also no voids are formed between the cathode, the support cylinder, and the heat-insulating material upon sintering, so that its thermal conductivity can be made better and the falling of insulator can also be prevented.</p> |
